durusmail: mems-talk: methods to hold thin glass wafers
methods to hold thin glass wafers
2009-07-07
2009-07-07
2009-07-07
2009-07-09
methods to hold thin glass wafers
li shifeng
2009-07-07
Hi, I am working on 4" or 3" thin glass wafers. Because it is thin, glass wafer
is very easy to break during processes. I am looking for any tools or methods to
hold these thin glass wafers.

Thanks!

shifeng
reply