durusmail: mems-talk: methods to hold thin glass wafers
methods to hold thin glass wafers
2009-07-07
2009-07-07
2009-07-07
2009-07-09
methods to hold thin glass wafers
Rejoy Surendran
2009-07-09
Hello David,

You could try Lintec double sided tape and attach a carrier. Try a tape
with one side UV and other side NON-UV for easy release.

Rejoy Surendran


-----Original Message-----
From: mems-talk-bounces@memsnet.org
[mailto:mems-talk-bounces@memsnet.org] On Behalf Of li shifeng
Sent: Tuesday, July 07, 2009 6:06 AM
To: mems-talk@memsnet.org
Subject: [mems-talk] methods to hold thin glass wafers

Hi, I am working on 4" or 3" thin glass wafers. Because it is thin,
glass wafer is very easy to break during processes. I am looking for any
tools or methods to hold these thin glass wafers.

Thanks!

shifeng

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