Hi Yingtao,

Unexposed AZ resist could be stored for more than 6 month when it is vacuum
sealed. The same is true for exposed resist. Be carefull if you have very tiny
pattern. Storage will smear a few nm and will end with the loss of sharp edges
in any dimensions. We have tested 100nm lines and storage of 1h to 5d. If
possible you can freeze the vacuum sealed material to decrease this effect.
Reminder: to avoid moisture do not open package before it has reached room
temperature.

Regards,

Bernd

-----Ursprüngliche Nachricht-----
Von: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org] Im
Auftrag von Y.Tian
Gesendet: Freitag, 10. Juli 2009 12:03
An: General MEMS discussion
Betreff: [mems-talk] Storage of developed AZ photoresist

Hi All,

Does anybody have the experience about storage of the wafers with developed AZ
photoresist patterns? I just got loads of samples patterned with AZ, but I can
not use them immediately. I just have general idea that I should keep them away
from UV and keep them dry. Anything specific I should keep in mind?

Thank you all.

Yingtao