Thanks Peng,

I think it will be very helpful. And I am also interesting of the groove
things you mention about. Is it necessary for the delay bonding?

Thank you.



2009/7/18 Peng Li 

> Hey Liang,
>
> You may try the method we are using here in our lab. Spray ethanol or
> methanol on the PDMS surface after plasma treatment. Then you can align
> PDMS slab with your patterns on the wafer under a microscope without
> bonding them immediate. Don't spray too much or the PDMS slab will be too
> "slippery" to align. After the alignment, you can bake the chip on a
> hotplate at 85C for about 80 mins. Now you will have your chip. The trick
> is that you need to design some "grooves" on your pattern so the achohol
> can evaporate through them but not lift the PDMS.
>
> Sincerely,
>
> Peng Li

--
赵亮
南京大学化学化工学院
Liang Zhao
School of Chemistry and Chemical Engineering, Nanjing University