Dear All,

I have a stack of chromium/platinum/gold (20nm/20nm/200nm) onto glass.
I need to pattern and etch it to make electrodes. Process requirement
is such that I can not use lift-off process for the same. Can anyone
please suggest a method by which I can etch Platinum without affecting
gold on top of it. As far as I know aqua regia etches gold very fast,
so I can not use that for etching platinum. For dry etching we have
CF4 and SF6 gases available. Can these be used for etching platinum?
Any suggestions on the recipe for dry etching using these gases would
be very helpful.

Thanks and regards,

Nidhi