Hi cfshen,

May I know what exactly you mean when you say dense particles? Are you
seeing clustered islands? What pressure, voltage and current values you have
chosen?

Regards,
Prasanna

On Thu, Jul 30, 2009 at 12:39 AM, Chongfei Shen  wrote:

> Dear all,
>
> I'm using ebeam evaporation to deposit Ti and Al. Both films have dense
> particles observed under microscope. The evporation rates are controlled to
> be 4A/s. The wafers were thoroughly cleaned.
>
> What are the reasons that forms the particles? How to solve this problem?
>
> Thank you very much for your suggestions.
>
> cfshen

--
Thanks & Regards,
Prasanna Srinivasan