durusmail: mems-talk: Re: Economical Mask Making
Re: Economical Mask Making
Re: Economical Mask Making
Shekhar Bhansali
1995-10-26
We have had success with photo-reduction (2-1 and 3-1) for getting to good
quality 10 micron lines. We'd be interested in your results with a 10:1
reduction.

Shekhar

Dept of Electrical Engineering,
Royal Melbourne Institute of Technology,
Australia
Tel: +61 3 9660 2924
Fax: +61 3 9660 2007


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