Regarding "cheap" mask making for those on a low budget, I suggest
investigating a commercial house that can produce emulsion masks for
approximately $200 per directly from a computer generated data file.

At this cost, and with no intermediate steps to compromise quality, dust,
fingerprints, water spots, intermediate lens reductions, etc. or labor.... it
would seem a bargain for a 5 um CD mask +-1.25 um.

There are conditions, for this price the flash count should be under 35,000
(which I assume for most MEMS designs is not even a consideration!) a four inch
x 0.060 inch mask, and a delivery time of about eight days.

This price assumes no discussion with the vendor regarding the design, just an
electronic transfer of pattern information and the return of a completed mask,
so, beware that your design is very throughly checked before submitting the
file.

The contact person for specifications and further detail is;

Mike McMullen
Photo Sciences Inc.
2542 W. 237th St.
Torrance, CA 90505
310-784-7460
310-539-6740 fax
73352.1377@compuserve.com email

I can not recommend the service because I have not seen masks made at this
vendor, but provide the information to you as an alternative to evaluate for
your project needs.

Stephen Gilbert
University of Arizona
Optical Sciences Ctr
Tucson, Arizona 85721
520-626-9041