One thing that I came across was the sidewall profile of the edge. This is critical for the lift-off. Positive resists gave out positive tone profile which might generate a lot of troubles in lift-off. If you try to lift-off a thick film, the deposited film could be conformal on the positive tone sidewall and the lift-off will fail. By contrast, negative resist usually provides a negative tone profile (you can imagine this as an undercut on the edges). So the deposited film is naturally discontinuous on the edge. The lift-off is easy then. Jie On 10/27/09, Paul Nguyenwrote: > Dear all: > > I would like to hear your experiences of using Positive vs. Negative resists > in MEMS processing. What are the PRO vs. CON? I appreciate your information. > > Thanks and regards, > Paul * Zou Jie (Jay) * Department of Physics * University of Florida * Tel: +1-352-846-8018 * Email: zoujiepku@gmail.com * Homepage: http://plaza.ufl.edu/zoujie/