How does KOH compare to BOE in surface quality? Is one more or less isotropic? On Thu, Oct 29, 2009 at 4:24 AM, Fei Wangwrote: > Hi Xiao, > > It can be found from the following reference: > > "Anisotropic etching of crystalline silicon in alkaline solutions", J. > Electrochem. Soc., Vol.137, No.11, p3612, Nov.1990. > > 10%KOH 13.3um/hour (50degreeC) 25.2(60) 46(70) 82(80) > > Hope it helps. > > Best regards, > Yours sincerely > Fei Wang -- Nathan McCorkle Rochester Institute of Technology College of Science, Biotechnology/Bioinformatics