BOE etches oxide, KOH etches silicon. BOE etching of oxide is isotropic, KOH etching of silicon is anisotropic. Surface quality depends entirely on etching parameters (concentration, temperature, agitation, surfactants, etc.). I would imagine that BOE surface quality is more dependent on the surface quality of the silicon beneath the oxide than of the oxide itself... -- Brian C. Stahl Graduate Student Researcher UCSB Materials Research Laboratory brian.stahl@gmail.com / bstahl@mrl.ucsb.edu Cell: (805) 748-5839 Office: MRL 3117A On Thu, Oct 29, 2009 at 10:28 AM, Nathan McCorklewrote: > How does KOH compare to BOE in surface quality? Is one more or less > isotropic?