durusmail: mems-talk: vertical taper Photoresist profile
vertical taper Photoresist profile
2009-10-30
2009-10-31
2009-10-31
2009-11-02
vertical taper Photoresist profile
QiuWeibin
2009-10-30
 Dear All,

    We are trying to get the vertical taper PR profile with 8mm size and 0-1.5um
thickness. Can anyone give us some suggestion?  We want to avoid a grey scale
mask, since they are so costly.

Thanks a lot

Qiu
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