Hi Qiu,

Sometime back I was working on these kind of structures and I was using
CTP-100  Negative tone photoresist from Clariant.
With exposure gaps of ~ 4-6 micron I was getting profiles with angles
ranging from 45 to 70 degrees.

sudesh

>
>  Dear All,
>
>     We are trying to get the vertical taper PR profile with 8mm size and =
> 0-1.5um thickness. Can anyone give us some suggestion?  We want to avoid =
> a grey scale mask, since they are so costly.
>
> Thanks a lot
>
> Qiu