Two excellent papers on the topic: "Etch Rates for Micromachining Processing" Kirt R. Williams, Richard S. Muller, Journal of Microelectromechanical Systems, Vol 5 No 4 Dec 1996 pp 256-269 "Etch Rates for Micromachining Processing - Part II" Kirt R. Williams, Kishan Gupta, Matthew Wasilik, Journal of Microelectromechanical Systems, Vol 12 No 6 Dec 2003 pp 761-778 Loren -----Original Message----- From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org] On Behalf Of D.Grimm@ifw-dresden.de Sent: Friday, November 06, 2009 6:42 AM To: mems-talk@memsnet.org Subject: [mems-talk] List of attacked/etched materials Hi, I am looking for papers/books/publications stating which metal is etched/attacked/not attacked by the most common etchants (mainly HF, HCl, H2O2, citric acid, phosphoric acid). Furthermore I'd like to find also information about attack of some common semiconductors and oxides (like GaAs, Si, Al2O3, SiO2, HfO2). I could only find books showing which etchant etches BEST which metal - like the book 'Advanced Inorganic Chemistry' of F. Cotton. But I need to know if there is non/some/a lot of attack of a material. E.g. is Nickel totally stable in HCl, Cr in HF etc., or is there a considerable attack? Thanks in advance Daniel