You need a corrosion table. These are tables which the etch rate or
material loss per area for a list of metals versus a list of liquids.
There are quite a variety of these lists.

Ed

-----Original Message-----
From: mems-talk-bounces@memsnet.org
[mailto:mems-talk-bounces@memsnet.org] On Behalf Of
D.Grimm@ifw-dresden.de
Sent: Friday, November 06, 2009 8:42 AM
To: mems-talk@memsnet.org
Subject: [mems-talk] List of attacked/etched materials


Hi,

I am looking for papers/books/publications stating which metal is
etched/attacked/not attacked by the most common etchants (mainly HF,
HCl, H2O2, citric acid, phosphoric acid). Furthermore I'd like to find
also information about attack of some common semiconductors and oxides
(like GaAs, Si, Al2O3, SiO2, HfO2).

I could only find books showing which etchant etches BEST which metal -
like the book 'Advanced Inorganic Chemistry' of F. Cotton. But I need to
know if there is non/some/a lot of attack of a material. E.g. is Nickel
totally stable in HCl, Cr in HF etc., or is there a considerable attack?

Thanks in advance
Daniel