durusmail: mems-talk: Replacement of critical point drying
Replacement of critical point drying
2009-11-06
2009-11-07
2009-11-08
2009-11-08
Replacement of critical point drying
lin yu
2009-11-06
Hi all,

I'm trying to suspend a beam structure with 150nm wide and 10um long
with critical point drying process. However, our CPD equipment is very
violent while introducing liquid CO2. After this process, all the suspended
beams are gone. So I was wondering if there's a possible replacement of
CPD process to suspend beam structures. I heard that people use some
kind of low surface tension liquid and air dry the samples. Does anyone have
experience on this? Any suggestion is appreciated.

Thanks,
Lin
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