Why not measure the spectra of the infrared of the microheater? It should
follow a black body curve of sorts. The hottest region should dominate the
spectra, since radiation intensity follows the fourth power of temperature.

Also, if there are emmission lines in the radiated spectra, their relative
ratio of intensity is a function of temperature. That is how they measure
the temperature of stars.

Ed

-----Original Message-----
From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org]
On Behalf Of Jungwook Choi
Sent: Wednesday, November 18, 2009 7:42 AM
To: General MEMS discussion
Subject: [mems-talk] Temperature measurement of microheater


Dear all,

I fabricated a silicon microheater on an SOI wafer. The dimensions of the
microheater are 5 um width and 50 um long.

I need to measure the temperature distribution of microheater when it is
joule-heated. I expect the highest temperature of the microheater to be
around 1000˚C. So, I tried to utilize IR camera, but the resolution of IR
camera in my facility is 70 um. In the case of scanning thermal microscope,
the maximum measureable temperature is limited below 200˚C.

Which apparatus is adequate for my situation? Any suggestions and comments
would be highly appreciated regarding above issues.

Thanks,

J. Choi