Hi, As you have a Si heater a good option is the Raman spectroscopy. Elina Iervolino PhD student Delft University of Technology Office Phone: +31 (0)15-2578040 Web page:www.xensor.nl -----Original Message----- From: Edward Sebesta [mailto:esebesta@tx.rr.com] Sent: Thu 11/19/2009 4:31 AM To: 'General MEMS discussion' Subject: Re: [mems-talk] Temperature measurement of microheater Why not measure the spectra of the infrared of the microheater? It should follow a black body curve of sorts. The hottest region should dominate the spectra, since radiation intensity follows the fourth power of temperature. Also, if there are emmission lines in the radiated spectra, their relative ratio of intensity is a function of temperature. That is how they measure the temperature of stars. Ed