Hi Ryu, Have you tried deposited very thin PECVD USG on your substrate before aSi deposition? I know adhesion between aSi and USG is good. Good Luck. Pin > > ---------- Forwarded message ---------- > From: nz_overlander@yahoo.co.jp > To: mems-talk@memsnet.org > Date: Thu, 26 Nov 2009 21:39:59 +0900 > Subject: [mems-talk] How to improve adhesion between aSi (by PECVD) on > glass > Dear all, > > I want to improve adhesion amorphous Si film deposited by PECVD on the > soda lime glass substrate. > Now I wash the substrate by fuming HNO3 before CVD, but some of a-Si > film is peeled off. > > So I'm going to try following approaches to improve adhesion, > (1)Washing substrate by H2SO4-H2O2 > (2)Depositing Cr or Ti layer before a-Si CVD > (3)Anodically bonding interface of a-Si film and substrate after CVD > (not wafer to wafer bonding) > > In case of (2), I'm afraid of oxidation of Cr or Ti when carrying > substrate from sputtering facility to CVD. > In (3), there is no paper or report to improve adhesion with this approach. > > If some of you have tried above approaches, will you tell me if it can > go well or not? > > And does anybody know other approaches? > > thanks, > Ryu