I would think that particulate would refer to particles. Crystalite would refer to crystals in polycrystalline material. Grain is a colloquial term, referring to the cellular nature of something, from the grain of wood, to the grain of some substance that is composed of many units pressed together. A polycrystalline material might be said to have a grain, since grain is a colloquial term. My take on it anyways. Ed -----Original Message----- From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org] On Behalf Of Evelyn B Sent: Monday, November 30, 2009 3:32 PM To: General MEMS discussion; Evelyn Benabe Subject: [mems-talk] Crystallite, grain, particulate size I have seen the terms grain and crystal size used when talking about properties that change as a function of film annealing. Is there any difference between grain, crystal or even particulate size that anyone can explain to me? Thanks to all, Evelyn