When I was doing my master's on Poly Si, many year ago, the term grain size was used for both poly crystals and for metal grain structure. These both change as a during annealing. Shay -----Original Message----- From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org] On Behalf Of Evelyn B Sent: Monday, November 30, 2009 11:32 PM To: General MEMS discussion; Evelyn Benabe Subject: [mems-talk] Crystallite, grain, particulate size I have seen the terms grain and crystal size used when talking about properties that change as a function of film annealing. Is there any difference between grain, crystal or even particulate size that anyone can explain to me? Thanks to all, Evelyn