Hi, Using an evaporation coater I've found that the deposition rate plays a huge effect in the properties of the aluminium layer. If you can try slowing the deposition down/speeding it up. Good luck, Daniel -----Original Message----- From: Pramod Gupta [mailto:gupta_pramod@yahoo.com] Sent: 15 December 2009 10:18 To: General MEMS discussion Subject: [mems-talk] Adhesion of metal layer on thick photoresist/polymer Hi I am trying to deposit about 5.0 um thick Aluminum film on 20um photoresist/polymer. But the metal layer does not adhere well on photoresist/polymer and peels off. Some of the methods I have tried to improve the adhesion are degas, preclean, Ti glue layer etc. Because of the photoresist, I can not increase the substrate temp more than 150C. Has any one come across this kind of problem and possible solution? With regards, Pramod