Hi All - I am trying to etch 300nm Al on Si using Cr as an etch mask. The etching tool is an Oxford PlasmaLab ICPRIE, using HBr chemistry. I find that this works pretty well, but due (I presume) to an electrochemical effect, the Al does not etch completely at all locations near the Cr mask. So, I wonder: has anybody tried this before? Any suggestions? (I'm attempting this etch in order to pattern two masks simultaneously on one layer of Al: the first mask in negative by liftoff of Cr, the second mask in positive tone with photoresist.) Thanks! Dr. Aaron Datesman Post-Doctoral Research Associate Materials Science Division Argonne National Laboratory 9700 S. Cass Avenue Bldg. 223, B-217 Argonne, IL 60439 630-252-9154 (office) 630-252-7777 (fax) 773-899-1095 (cell) datesman@anl.gov