I would consider that the Cr has diffused into the Aluminum during the metal deposition steps. Ed -----Original Message----- From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org] On Behalf Of Aaron Datesman Sent: Wednesday, January 13, 2010 1:09 PM To: General MEMS discussion Subject: [mems-talk] Use of Cr mask for Al RIE Hi All - I am trying to etch 300nm Al on Si using Cr as an etch mask. The etching tool is an Oxford PlasmaLab ICPRIE, using HBr chemistry. I find that this works pretty well, but due (I presume) to an electrochemical effect, the Al does not etch completely at all locations near the Cr mask. So, I wonder: has anybody tried this before? Any suggestions? (I'm attempting this etch in order to pattern two masks simultaneously on one layer of Al: the first mask in negative by liftoff of Cr, the second mask in positive tone with photoresist.) Thanks! Dr. Aaron Datesman