durusmail: mems-talk: Lift-off pattern of Cu or Ni film
Lift-off pattern of Cu or Ni film
2010-01-13
2010-01-14
Lift-off pattern of Cu or Ni film
leiwangsdu
2010-01-13
I'm a research fellow. I have a question about lift-off process of Cu or Ni.
Is it possible to fabricate a pattern of Cu or Ni film with nearly steep
sidewall.
The thickness of Cu or Ni is 3-4 microns. If anyone knows, please tell me
the method and the necessary process.

leiwangsdu
2010-01-14
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