Hi, Andrea,

For 2um S1813, a soft bake of 1min at 110degree with hotplate is good
enough. To achieve highly vertical profile, you have to skip the hard
bake step. Then, you may need better soft bake such like 3min at
100degree.

Hope it helps, good luck!

Best regards,
Fei

2010/1/17, Andrea Mazzolari :
> Hi All,
>
> i need to pattern S1813 with vertical sidewalls, but at the present time i
> get an angle of about 54 deg. Awful...
> My maskaligner is an old karl suss.
>
> Here is my procedure:
> -spinning of S1813
> -soft bake 3 min at 115 deg
> -photolitography in contact mode (150mJ)
> -development in MF319 (about 45 seconds)
> -hard bake 15 min at 115.
>
> Any suggestion to improve the sidewall angle ?
>
> Best regards,
> Andrea