Hello Lin, We do have already some years using this Electro Deposition resist. Works fine, but some time a lot of pinholes are observed. Mostly caused by a surface which is not clean. Best performance was seen on a Cu seedlayer, but we also deposited on Au, Ti and other conductive layers. Best regards, Peter Kuijpers MiPlaza Technology Laboratories Philips Research Europe High Tech Campus 04 Postbox HTC-4-1 5656 AE Eindhoven The Netherlands Tel.: +31 402743667 +31 612507027 Email: p.e.m.kuijpers@philips.com -----Original Message----- From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org] On Behalf Of lin yu Sent: Wednesday 20 January 2010 19:21 To: General MEMS discussion Subject: [mems-talk] Electroplating Photoresist on conductive surface Hi all, Does anyone have any experience of electroplating PR on conductive surface? The idea is to cover the conductive surface with some kind of PR and then etch the other Si areas in DRIE. The normal mask for DRIE is SiO2 or silicon nitride. But I cannot just cover the metal region without covering the Si. So I'm thinking using some kind of electroplatable PR. I found this PR called INTERVIA(tm) 3D-P PHOTORESIST. Has anyone used it before? I really appreciate if anyone could provide any suggestion on this process. Thanks, Lin