durusmail: mems-talk: XeF2 gas etch plexiglass?
XeF2 gas etch plexiglass?
2010-01-26
2010-01-26
2010-01-26
XeF2 gas etch plexiglass?
Jiho Song
2010-01-26
Hello all,

Do you guys know Xenon Difluoride etches the plexiglass?

I am planning to bond the molded Si chip with polymer onto the
plexiglass and put it into the chamber.

Please let me know if you any ideas.

Thank you.
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