Well, I tried to use oxygen plasma to strip SU8 for some experiments and I always got a white film on top of SU8 but to significant removal. I used SU8 2075 and thicknesses between 25 and 50 µm. maria -----Original Message----- From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org] On Behalf Of David Pierce Sent: 1. februar 2010 17:34 To: General MEMS discussion Subject: Re: [mems-talk] Stripping SU-8 Paul, I use an oxygen plasma to strip SU-8 and it seems to work well. David On Feb 1, 2010, at 10:04 AM, Paul Nguyen wrote: > Hi all, > > Regarding Su-8 resist, does anyone have experience on how hard to > strip this resist? My colleagues have mentioned to me that they have > had a hard time stripping it. > > Thanks, > Paul