Hi Shifeng,

How long are your lines? It is very difficult to lift off long, thin lines.
My suggestion is to try to avoid any strong liquid flush during lift-off.
You can heat remover-PR a little bit and let the metal lift-off by itself.

Lin

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From: "li shifeng" 
Sent: Wednesday, March 10, 2010 7:44 PM
To: 
Subject: [mems-talk] Au lift off

> Hi, All,
>
> I pattened 100nm lines on the glass substrate. The height of the line is
> around 250nm. I used an e-beam evaportor to deposit 5nm Ti and 80nm Au. I
> found it is very hard to lift off. What are the possible reasons?  Any
> suggestions to succeed with an Au lift off process for smaller patterns?
>
> Thanks!
>
> Shifeng