durusmail: mems-talk: metallic mask
metallic mask
Andrea Mazzolari
2010-04-05
Hi Dan,

do you mean that there could be some particles on the wafer surface ?

Best regards,
Andrea

> Andrea,
>
> I've found that the biggest challenge when using evaporated metal this
> way is particles.  Every particle results in a pinhole in your mask that
> allows the etchant to get under the mask.
>
> Dan
>
reply