Can you quantify what value you mean by "hi-storage: capacitance, voltage...? Marco ________________________________________________________________ Marc Reinig Phone: (831) 459-4362 Laboratory for Adaptive Optics Fax: (831) 459-2298 UCO/Lick Email: mreinig@ucolick.org University of California, Santa Cruz 1156 High Street Santa Cruz, CA 95064 > -----Original Message----- > > Hi guys, > > I am wondering which micromechanical processes exist to obtain high- > storage multistack capacitors. I imagine you may realize it or by > employing multiple lithographic steps for each metal plate / > dielectrics, or, by patterning, transferring and bonding of a lot of > single plates into multi-stacks. > > > I could not find any methods, reports, papers around describing the > actual methods of small footprint capacitors. Any help and > references are highly welcome. > > Bye > > Daniel