Hi Nimo, Two things come to mind: 1. You might need more BHF? 2. Bubbles may be preventing the BHF from reaching certain areas? Good luck! Felix On Jul 19, 2010, at 2:29 PM, antwi nimo wrote: > Hello Friends, > > I was wondering if there are some silicon-dioxide which will not > etch in > BHF(31°C). > > I was etching the buried oxide of an SOI which has the device layer > DRIE'ed and > i experienced this suprising effect whereby some of the oxide is > somewhat > resistant to the BHF. most of the oxide is etched but on some parts, > there is > still oxide which seems to be resistant to the BHF. There has not > been any high > temperature oven process either......so i cant explain this effect. > Has anybody experienced this effect and possible explanation why some > silicon-dioxide will not etch in BHF. > > thanks in advance. > Nimo Felix Lu felix_lu@yahoo.com