Nimo: I have seen this effect on wafers that have been processed thru a boron nitride operation and somehow form a silicide in certain areas of the device wafers. Otherwise you might have a form of polymer from the drie etch left behind. An oxygen process at the end of your etch process or ending on an SF6 period should remove those polymers. Also, using a few drops of surfactant in your BOE might help to wet the surface being etched and allow a more complete removal of the oxide. Bob Henderson -----Original Message----- From: mems-talk-bounces+bob.henderson=etchedintimeinc.com@memsnet.org [mailto:mems-talk-bounces+bob.henderson=etchedintimeinc.com@memsnet.org] On Behalf Of Elina Kasman Sent: Wednesday, July 21, 2010 9:19 AM To: mems-talk@memsnet.org Subject: Some silicon-dioxide will not etch in BHF...can that be? It is possible that you had an effect of material diffusion or re-deposition during the DRIE process, which would make the oxide more resistant to BHF. Elina