durusmail: mems-talk: rib waveguide using dry etch
rib waveguide using dry etch
2010-07-22
2010-07-22
2010-07-22
2010-07-26
rib waveguide using dry etch
杜 彦召
2010-07-26
Hi Pramod Gupta:

I am etching silicon waveguide for optical communication.

Does anyone know how to inspect the rib waveguide sidewall roughness in mass
production?

Thanks
reply