Hi Marcel, Which substrate you are thinking of? It is no problem to etch Silicon with both gases. For deep trenches you'll need to optimise the conditions. For very deep trenches, the Bosch process (specialized RIEs only) might be a better hint. Best Daniel * Dr. Daniel Grimm * IFW Dresden * - Institute for Integrative Nanosciences - * E-Mail: d.grimm@ifw-dresden.de * Phone: +49 351 4659-314 * Mobile: +49 177 4926561 -----Original Message----- From: mems-talk-bounces+d.grimm=ifw-dresden.de@memsnet.org [mailto:mems-talk-bounces+d.grimm=ifw-dresden.de@memsnet.org] On Behalf Of Marcel Spurny Sent: Dienstag, 3. August 2010 16:20 To: General MEMS discussion Subject: [mems-talk] DRIE with SF6 and CHF3 Hello everyone, is it possible to do deep reactive ion etching in a standart RIE with SF6 and CHF3? If so, can anyone give me a hint for the process to use? Cheers, Marcel