Hello, Jack!

I have seen the recommendations to use a small drop of turbomolecular  vacuum
pump oil for fixing the samples to table and additionally provide better thermal
contact.
TMP pump oil has low vapor pressure and should not give any significant
deterioration of vacuum.

Regards,
Ivan S. Baturin

> -----Original Message-----
> From: Jack Ma [mailto:zetao.ma@gmail.com]
> Sent: Wednesday, September 22, 2010 2:29 AM
> To: mems-talk@memsnet.org
> Subject: [mems-talk] vacuum grease used in RIE system
>
> Dear all:
>
>   Can anyone provide a name of vacuum grease which can be used in RIE
> system
> (such as Technics mircro-pd series 800II) to prevent the up side down of
> samples.
> --
> BR.
> Jack,HKU