durusmail: mems-talk: vacuum grease used in RIE system
vacuum grease used in RIE system
2010-09-21
2010-09-26
2010-09-27
vacuum grease used in RIE system
Zetao MA
2010-09-27
Dear Ivan:

   Thank you for your advice.  I will try to use the them.


On Mon, 27 Sep 2010 01:23:53 +0800, Ivan Baturin 
wrote:

> Hello, Jack!
>
> I have seen the recommendations to use a small drop of turbomolecular
> vacuum pump oil for fixing the samples to table and additionally provide
> better thermal contact.
> TMP pump oil has low vapor pressure and should not give any significant
> deterioration of vacuum.
>
> Regards,
> Ivan S. Baturin

--
BR.
Dept. of EEE., CYC712,
University of Hong Kong.
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