Increase SF6, decrease C4F8. Or increase power. This would make the etching more isotropic, undirectional. On Sun, Sep 26, 2010 at 12:12 AM, 杜 彦召wrote: > Hi all; > > Now i am making silicon rib waveguide using dry etcing . To decrease the sidewall roughness as much as possible i plan to use Room T continuous process instead of Bosch process. Anybody can give some suggstion to increase the etch rate ? > > My process parameter:SF6:C4F8:O2 > > sccm:5sccm:80sccm,power=800w,time=120s,pressure=10mT,RF power=10w > > > Andrew * Zou Jie (Jay) * Department of Physics * University of Florida * Email: zoujiepku@gmail.com