Hi, Liang, Thx a lot for the information. I will try and let the community know how it goes. Thx Guocheng -----Original Message----- From: mems-talk-bounces+sgc_opt=yahoo.com.cn@memsnet.org [mailto:mems-talk-bounces+sgc_opt=yahoo.com.cn@memsnet.org] On Behalf Of Liang Zhao Sent: Thursday, October 14, 2010 1:34 AM To: General MEMS discussion Subject: Re: [mems-talk] PDMS molding using a PDMS mold Hi,Guocheng, I tried this before by using trichloro- (1H,1H,2H,2H-perfluorooctyl)silane (Sigma-Aldrich, St. Louis, MO), and most importantly, it's work. But I am not sure about your features. It may be difficult when your pattern with high depth/width. Please let me know if you have success. good luck.