Does anyone know the latest, or the most production compatible KOH mask for protecting the metallized front side of the wafer ? Our last process step requires back etch of the SOI handle wafer down to BOX layer to form thin membranes and we need a front side protection coating other than the commonly used nitride, oxide and metal masks. Clean removal in batch processing of this mask after KOH etch is also critical. Thanks, Kris K. Vossough, Ph.D. Principal Nano and Micro Technology Consultants E-mail: vossough@memswork.net Voice: (408)373-5413 Fax: (650)798-5001 http://www.memswork.net