Hello, In here at MiPlaza we use a paryleen coating (2-5µm) for protecting the frontside. Removal can be done with a simple O2 plasma. Regards, Peter Kuijpers MiPlaza Technology Laboratories Philips Research Europe High Tech Campus 04 Postbox HTC-4-1 5656 AE Eindhoven The Netherlands Tel.: +31 402743667 +31 612507027 Email: p.e.m.kuijpers@philips.com -----Original Message----- From: mems-talk-bounces+p.e.m.kuijpers=philips.com@memsnet.org [mailto:mems- talk-bounces+p.e.m.kuijpers=philips.com@memsnet.org] On Behalf Of K.Vossough Sent: Tuesday 16 November 2010 9:45 To: 'General MEMS discussion' Subject: [mems-talk] Front side KOH mask for backside membrane etch Does anyone know the latest, or the most production compatible KOH mask for protecting the metallized front side of the wafer ? Our last process step requires back etch of the SOI handle wafer down to BOX layer to form thin membranes and we need a front side protection coating other than the commonly used nitride, oxide and metal masks. Clean removal in batch processing of this mask after KOH etch is also critical. Thanks, Kris K. Vossough, Ph.D. Principal Nano and Micro Technology Consultants E-mail: vossough@memswork.net Voice: (408)373-5413 Fax: (650)798-5001 http://www.memswork.net