durusmail: mems-talk: Antistick layer for nanoimprinting
Antistick layer for nanoimprinting
2011-01-19
2011-01-20
2011-01-21
Antistick layer for nanoimprinting
Xiaohui Lin
2011-01-19
Hi:

    We are doing nanoimprinting using mold with Ni finish (all pattern are
in Ni). Could anyone suggest an anti-stick layer material that can render
the surface more hydrophobic?

Thanks.

--
Lin, Xiaohui
Ph.D. Program in Electrical and Computer Engineering
Nanophotonics and Optical Interconnects Group
Microelectronics Research Center
The University of Texas at Austin
E-mail: xiaohui.lin@mail.utexas.edu
Office: (512) 471-4349
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