You can try treating is with HMDS. It's not the best but you probably have
some around

Shay

-----Original Message-----
From: mems-talk-bounces+shay=mizur.com@memsnet.org
[mailto:mems-talk-bounces+shay=mizur.com@memsnet.org] On Behalf Of Xiaohui
Lin
Sent: Wednesday, January 19, 2011 6:20 PM
To: General MEMS discussion
Subject: [mems-talk] Antistick layer for nanoimprinting

Hi:

    We are doing nanoimprinting using mold with Ni finish (all pattern are
in Ni). Could anyone suggest an anti-stick layer material that can render
the surface more hydrophobic?

Thanks.

--
Lin, Xiaohui