HMDS will likely help. It can be applied either in the vapor phase using a hot plate or alternatively in the liquid phase by dispensing on the wafer allowing about 30 seconds for a puddle of the material to remain on the wafer and then spin off the excess followed by the spin on coat. Gary Hillman S-Cubed PO Box 365 9 Mars Ct. Montville, NJ 07039 phone 973-263-0640 ex 35 fax 973-263-8888 -----Original Message----- From: mems-talk-bounces+garyh=s-cubed.com@memsnet.org [mailto:mems-talk-bounces+garyh=s-cubed.com@memsnet.org]On Behalf Of hui yan Sent: Tuesday, January 25, 2011 12:56 AM To: mems-talk@memsnet.org Subject: [mems-talk] AZP4620 peels off i m using positive photoresist AZP4620 for photolithography. However, during the development step, the resist layer peels off when washed with DI water; though i have tried numerous times and have shorten the development time to 20s. I have cleaned my wafer using piranha solution, followed by DI water rinse, then rinsing with acetone, IPA, DI water. And then dehydrate my wafer at 120 C for 30 min. Does HMDS primer helps? if so, what is the recipe for spin coating it? Regards, Hui Yan Mechanical Engineering National University of Singapore