durusmail: mems-talk: why no lift-off for Si processing
why no lift-off for Si processing
2011-02-28
2011-02-28
2011-03-01
why no lift-off for Si processing
Xiaochen Sun
2011-02-28
Hi,

People use metal lift-off for III-V (GaAs, InP etc.) metallisation
everyday. Could anyone let me know the reason why people rarely use
lift-off in Si processing? We usually do Ti/Al sputtering/evaporation
and then dry etch metal. Is it something to do with adhesion? Thanks!

Andy,

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