durusmail: mems-talk: Spin coating epoxy
Spin coating epoxy
2011-03-09
2011-03-10
2011-03-10
Spin coating epoxy
Amos Hercowitz
2011-03-09
I would like to spin coat an epoxy material that was originally designed to
be used by screen printing.

For this, I've tried to dilute the epoxy with a solvent until it is thin
enough but when spinning I could not get rid of the comets/flare defects. it
seems that there are many micro bubblers inside the material which "pop"
when wafer is spinned and they are the ones causing the comets. what is the
best way to take out the bubbles out of the material? Pot life of the epoxy
is 3 days.

thanks
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