A common trick for removing micro bubbles in SU-8 is to place the closed bottle in an oven at around 60C. Vacuum will reduce the solvent content but I guess in your case you can simply add a bit more to compensate in the first place. I also believe Microchip filter SU-8. Particulate contamination could also be causing your problems. On 10 Mar 2011 05:32, "Tsoll Doiiu"wrote: > How about store it in desiccator for a while? > > If you dilute epoxy, perhaps it is not so viscous, and simple desiccator should help. > Otherwise, you can use vacuum chambers, say I've use exchanging chamber of glovebox to make higher vacuum than in desiccator. Also vacuum equipment (plasma, e-beam chambers) can be used, but than you should worry not to contaminate chamber.