durusmail: mems-talk: Pyrex and Borofloat glass wafer clean
Pyrex and Borofloat glass wafer clean
2011-03-14
2011-03-14
Pyrex and Borofloat glass wafer clean
Alexander Slesarev
2011-03-14
Cleaning with Piranha solution is very similar to first RCA step -
organics clean.

You should not apply second step of RCA as HF will damage glass.
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