Meny,

It is different.

RCA etchs metals while sulfuric peroxide oxidizes whatever it there on the
surface.

Shay

-----Original Message-----
From: mems-talk-bounces+shay=mizur.com@memsnet.org
[mailto:mems-talk-bounces+shay=mizur.com@memsnet.org] On Behalf Of Kabla
Meni
Sent: Monday, March 14, 2011 7:44 AM
To: mems-talk@memsnet.org
Subject: [mems-talk] Pyrex and Borofloat glass wafer clean

Can anyone explain why Piranha solution is used for cleaning glass wafers?

Can we use RCA instead?

Regards,
Meni Kabla
Rafael